
Orthodyne meets the requirements of the semiconductors industry
Gases involved in the semiconductors industry :
> Sample: Argon, Helium, Hydrogen, Nitrogen, Oxygen
> Impurities : H2, O2, Ar, N2, CH4, CO, CO2 and NMHC
> Threshold : < 1ppb resolution guaranteed (Limit Detection Level)
Measurement capabilities
Gas|Comp. | H2 | N2 | CH4 | CO | CO2 | NMHC | Ar | O2+Ar |
---|---|---|---|---|---|---|---|---|
ARGON | < 0.5 ppb | < 0.5 ppb | < 0.5 ppb | < 1 ppb (DID) < 0.5 ppb (FID) | < 0.5 ppb (DID) < 1 ppb (FID) | < 1 ppb | / | NA |
HELIUM | < 0.5 ppb | < 0.5 ppb | < 0.5 ppb | < 1 ppb (DID) < 1 ppb (FID) | < 0.5 ppb (DID) < 1 ppb (FID) | < 1 ppb | < 0.5 ppb | < 0.5 ppb |
HYDROGEN | NA | < 0.5 ppb | < 0.5 ppb | < 1 ppb (DID) < 0.5 ppb (FID) | < 0.5 ppb (DID) < 1 ppb (FID) | < 1 ppb | < 0.5 ppb | < 0.5 ppb |
NITROGEN | < 0.5 ppb | NA | < 0.5 ppb | < 1 ppb (DID) < 0.5 ppb (FID) | < 0.5 ppb (DID) < 1 ppb (FID) | < 1 ppb | < 0.5 ppb | < 0.5 ppb |
OXYGEN | < 0.5 ppb | < 0.5 ppb | < 0.5 ppb | < 1 ppb (DID) < 1 ppb (FID) | < 0.5 ppb (DID) < 1 ppb (FID) | < 1 ppb | < 0.5 ppb | / |