Semiconductors

Semiconductors Analysers- Orthodyne Gas Chromatography

Orthodyne meets the requirements of the semiconductors industry

Gases involved in the semiconductors industry :

> Sample: Argon, Helium, Hydrogen, Nitrogen, Oxygen

> Impurities : H2, O2, Ar, N2, CH4, CO, CO2 and NMHC

> Threshold :  < 1ppb resolution guaranteed (Limit Detection Level)

Measurement capabilities

Gas|Comp.H2N2CH4COCO2NMHCArO2+Ar
ARGON< 0.5 ppb< 0.5 ppb< 0.5 ppb< 1 ppb (DID)
< 0.5 ppb (FID)
< 0.5 ppb (DID)
< 1 ppb (FID)
< 1 ppb /NA
HELIUM< 0.5 ppb< 0.5 ppb< 0.5 ppb< 1 ppb (DID)
< 1 ppb (FID)
< 0.5 ppb (DID)
< 1 ppb (FID)
< 1 ppb < 0.5 ppb< 0.5 ppb
HYDROGENNA< 0.5 ppb< 0.5 ppb< 1 ppb (DID)
< 0.5 ppb (FID)
< 0.5 ppb (DID)
< 1 ppb (FID)
< 1 ppb < 0.5 ppb< 0.5 ppb
NITROGEN< 0.5 ppbNA< 0.5 ppb< 1 ppb (DID)
< 0.5 ppb (FID)
< 0.5 ppb (DID)
< 1 ppb (FID)
< 1 ppb < 0.5 ppb< 0.5 ppb
OXYGEN< 0.5 ppb< 0.5 ppb< 0.5 ppb< 1 ppb (DID)
< 1 ppb (FID)
< 0.5 ppb (DID)
< 1 ppb (FID)
< 1 ppb < 0.5 ppb/

All our instruments are equipped with:

> Diaphragm valvesDiaphragm valve - Orthodyne Gas Chromatography

> Electro-polished tubes

> VCR fittings

> Orbital Weldings

> Gas Purifiers for carrier gases: He, Ar, N2 and H2

Some Global References

  • Samsung (Austin, USA)
  • AP Intel (Dublin, Ireland)
  • Motorola (Toulouse, France)
  • Air Liquide (Crolles, France)
  • Promos 3, Nanya and Inotera Project (Taiwan)
  • Air Products (Avezzano, Italy)

Contact

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Semiconductors Analysers - Orthodyne Gas Chromatography
Semiconductors